Understanding the ISPP Slope in Charge Trap Flash Memory and its Impact on 3-D NAND Scaling

Verreck, DevinDevinVerreckArreghini, AntonioAntonioArreghiniSchanovsky, F.F.SchanovskyRzepa, G.G.RzepaStanojevic, Z.Z.StanojevicMitterbauer, F.F.MitterbauerKernstock, C.C.KernstockBaumgartner, O.O.BaumgartnerKarner, M.M.KarnerVan den Bosch, GeertGeertVan den BoschRosmeulen, MaartenMaartenRosmeulen2022-08-252022-07-092022-08-2520212380-9248WOS:000812325400012https://imec-publications.be/handle/20.500.12860/40085Understanding the ISPP Slope in Charge Trap Flash Memory and its Impact on 3-D NAND ScalingProceedings paper10.1109/IEDM19574.2021.9720506978-1-6654-2572-8WOS:000812325400012