Armini, SilviaSilviaArminiTerzieva, ValentinaValentinaTerzievaVanhaelemeersch, SergeSergeVanhaelemeerschMaex, KarenKarenMaex2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8490Composite nanoparticles for defectivity reduction during CMPOral presentation