Sub-5-nm-spatial resolution in scanning spreading resistance microscopy using full-diamond tips

Alvarez, D.D.AlvarezHartwich, J.J.HartwichFouchier, MarcMarcFouchierEyben, PierrePierreEybenVandervorst, WilfriedWilfriedVandervorst2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7131Sub-5-nm-spatial resolution in scanning spreading resistance microscopy using full-diamond tipsJournal article