Novel technologies in coater/developer to enhance the CD stability and to improve the defectivity toward N7 and smaller nodes

Kamei, YuyaYuyaKameiSano, YoheiYoheiSanoYamauchi, TakashiTakashiYamauchiKawakami, ShinichiroShinichiroKawakamiTadokoro, MasahideMasahideTadokoroEnomoto, MasashiMasashiEnomotoMuramatsu, MakotoMakotoMuramatsuNafus, KathleenKathleenNafusSonoda, AkihiroAkihiroSonodaDemand, MarcMarcDemandFoubert, PhilippePhilippeFoubert2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33244Novel technologies in coater/developer to enhance the CD stability and to improve the defectivity toward N7 and smaller nodesProceedings paperhttps://doi.org/10.1117/12.2514930