Puliyalil, HarinarayananHarinarayananPuliyalilFeurprier, YannickYannickFeurprierBriggs, BasoeneBasoeneBriggsLazzarino, FredericFredericLazzarinoWilson, ChrisChrisWilsonKumar, KaushikKaushikKumar2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33830Etch challenges in high aspect ratio aupervia patterningProceedings paper