Density-balancing mask sssignment for via patterning with directed self-assembly

Tung, Maryann C.Maryann C.TungGuo, DaifengDaifengGuoKarageorgos, IoannisIoannisKarageorgosWong, Martin D. F.Martin D. F.WongWong, H.-S. PhilipH.-S. PhilipWong2021-10-232021-10-232016-10https://imec-publications.be/handle/20.500.12860/27410Density-balancing mask sssignment for via patterning with directed self-assemblyMeeting abstract