Introducing novel metal gate materials for decananometer CMOS in the agile fab: a case study

Deweerd, WimWimDeweerdSchram, TomTomSchramCatana, GabrielaGabrielaCatanaShamiryan, DenisDenisShamiryanGaraud, SylvainSylvainGaraudHellin, DavidDavidHellinDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsWickramanayaka, S.S.WickramanayakaKawashima, T.T.KawashimaYamada, N.N.YamadaVertommen, JohanJohanVertommenLander, RobRobLander2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8844Introducing novel metal gate materials for decananometer CMOS in the agile fab: a case studyProceedings paper