De Messemaeker, JoJoDe MessemaekerKellens, KristofKristofKellensVan Genechten, DirkDirkVan GenechtenPut, StijnStijnPutNelis, DanielDanielNelisStrauven, YvanYvanStrauvenOng, PatrickPatrickOngDevriendt, KatiaKatiaDevriendt2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13607Stabilisation and control of improved nano-ceria dispersions for STI CMP slurriesProceedings paper