Dobbelaere, ThomasThomasDobbelaereMinjauw, MatthiasMatthiasMinjauwTareq, AhmadAhmadTareqVereecken, PhilippePhilippeVereeckenDetavernier, ChristopheChristopheDetavernier2021-10-232021-10-2320160022-3093https://imec-publications.be/handle/20.500.12860/26566Plasma-enhanced atomic layer deposition of zinc phosphateJournal articlehttp://www.sciencedirect.com/science/article/pii/S0022309316301351