Correlation between the growth-per-cycle and the surface hydroxyl group concentration in the atomic layer deposition of aluminum oxide from trimethylaluminum and water

Puurunen, RiikkaRiikkaPuurunen2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11065Correlation between the growth-per-cycle and the surface hydroxyl group concentration in the atomic layer deposition of aluminum oxide from trimethylaluminum and waterJournal article