De Gryse, O.O.De GryseClauws, P.P.ClauwsVanhellemont, JanJanVanhellemontLebedev, O.I.O.I.LebedevVan Landuyt, J.J.Van LanduytSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8763Characterization of oxide precipitates in heavily boron doped silicon by infrared spectroscopyJournal article