MEMS variable capacitor versus MOS variable capacitor for a 5GHz voltage controlled oscillator

Innocent, ManuelManuelInnocentWambacq, PietPietWambacqDonnay, StephaneStephaneDonnayTilmans, HarrieHarrieTilmansDe Man, HugoHugoDe ManSansen, WillyWillySansen2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6422MEMS variable capacitor versus MOS variable capacitor for a 5GHz voltage controlled oscillatorProceedings paper