Substitutional phosphorus incorporation in nanocrystalline CVD diamond thin films

Janssen, WiebkeWiebkeJanssenTurner, StuartStuartTurnerSakr, GeorgesGeorgesSakrJornard, FrancoisFrancoisJornardBarjon, JulienJulienBarjonDegutis, GiedriusGiedriusDegutisLu, Ying-GangYing-GangLuD'Haen, JanJanD'HaenHardy, AnAnHardyVan Bael, MarliesMarliesVan BaelVerbeeck, JohanJohanVerbeeckVan Tendeloo, GustaafGustaafVan TendelooHaenen, KenKenHaenen2021-10-222021-10-2220141862-6254https://imec-publications.be/handle/20.500.12860/23999Substitutional phosphorus incorporation in nanocrystalline CVD diamond thin filmsJournal article10.1002/pssr.201409235http://onlinelibrary.wiley.com/doi/10.1002/pssr.201409235/abstract