Readiness of EUV lithography for insertion into manufacturing: The imec NXE:3100 program

Gronheid, RoelRoelGronheidHendrickx, EricEricHendrickxHermans, JanJanHermansLorusso, GianGianLorussoFoubert, PhilippePhilippeFoubertPollentier, IvanIvanPollentierGoethals, MiekeMiekeGoethalsJonckheere, RikRikJonckheereVandenberghe, GeertGeertVandenbergheRonse, KurtKurtRonse2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20754Readiness of EUV lithography for insertion into manufacturing: The imec NXE:3100 programOral presentation