Ong, PatrickPatrickOngKellens, KristofKristofKellensChiodarelli, NicoloNicoloChiodarelliMeuris, MarcMarcMeurisLeunissen, PeterPeterLeunissen2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/15944CMP of novel materialsProceedings paper