Effective contact resistivity reduction for Mo/Pd/n-In0.53Ga0.47As contact

Zhang, JianJianZhangWang, LinlinLinlinWangYu, HaoHaoYuMerckling, ClementClementMercklingMols, YvesYvesMolsVais, AbhitoshAbhitoshVaisRamesh, SivaSivaRameshIvanov, TsvetanTsvetanIvanovSchaekers, MarcMarcSchaekersHoriguchi, NaotoNaotoHoriguchiMocuta, DanDanMocutaCollaert, NadineNadineCollaertDe Meyer, KristinKristinDe MeyerJiang, YulongYulongJiang2021-10-282021-10-2820190741-3106https://imec-publications.be/handle/20.500.12860/34531Effective contact resistivity reduction for Mo/Pd/n-In0.53Ga0.47As contactJournal articlehttps://ieeexplore.ieee.org/document/8851065