Analysis of trace metals in silicon nitride films by a vapor phase decomposition

Vereecke, GuyGuyVereeckeSchaekers, MarcMarcSchaekersVerstraete, KurtKurtVerstraeteArnauts, SophiaSophiaArnautsHeyns, MarcMarcHeynsPlante, W.W.Plante2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3992Analysis of trace metals in silicon nitride films by a vapor phase decomposition - solution collection approachProceedings paper