Vazsonyi, E.E.VazsonyiVertesy, Z.Z.VertesyToth, A.A.TothSzlufcik, JozefJozefSzlufcik2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8352Anisotropic etching of silicon in a two-component alkaline solutionJournal article