Analog performance of SOI FinFETs with different TiN gate electrode thickness

Galeti, M.M.GaletiRodrigues, M.M.RodriguesCollaert, NadineNadineCollaertSimoen, EddyEddySimoenClaeys, CorCorClaeysMartino, J.A.J.A.Martino2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17123Analog performance of SOI FinFETs with different TiN gate electrode thicknessProceedings paper