Si passivation for high-k gate dielectrics on GE MOSFETs: further developments and understanding

Caymax, MattyMattyCaymaxMitard, JeromeJeromeMitardMartens, KoenKoenMartensYang, LijunLijunYangPourtois, GeoffreyGeoffreyPourtoisVandervorst, WilfriedWilfriedVandervorstMeuris, MarcMarcMeurisLoo, RogerRogerLoo2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15074Si passivation for high-k gate dielectrics on GE MOSFETs: further developments and understandingMeeting abstract