Compliant substrate technology: integration of mismatched materials for opto-electronic applications

Vanhollebeke, KoenKoenVanhollebekeMoerman, IngridIngridMoermanVan Daele, PeterPeterVan DaeleDemeester, PietPietDemeester2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4896Compliant substrate technology: integration of mismatched materials for opto-electronic applicationsJournal article