Nanobeam diffraction strain analysis of released Ge gate-all-around nano-wires: challenges and limitations

Favia, PaolaPaolaFaviaWitters, LiesbethLiesbethWittersCapogreco, ElenaElenaCapogrecoVancoille, EricEricVancoilleBender, HugoHugoBender2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30698Nanobeam diffraction strain analysis of released Ge gate-all-around nano-wires: challenges and limitationsMeeting abstracthttp://abstracts.imc19.com/pdf/abstract_203.pdf