Zinth, AgnesAgnesZinthHouri, SamerSamerHouriPoot, MennoMennoPoot2026-06-042026-06-0420262072-666Xhttps://imec-publications.be/handle/20.500.12860/59560Studying the dynamical behavior of micro- and nano-mechanical systems (MEMSs and NEMSs) is essential in various fields from nonlinear dynamics to quantum technologies. Hence, it is important to precisely monitor the mechanical properties of MEMS and NEMS devices. In this work, we show how to track and spatially map various properties of a mechanical resonator, such as frequency shift, linewidth, and nonlinearity, by appropriately selecting three closely spaced drive frequencies and using phase-locked loops. This technique tracks changes in the system quickly and efficiently, without the need for repeated frequency sweeps of the oscillator response, simply by employing three phase-locked tones.engJournal article10.3390/mi17020213WOS:001700801900001MEDLINE:41753870