Non-destructive characterisation of porosity and pore size distribution in porous low-k dielectric films

Baklanov, MikhaïlMikhaïlBaklanovMogilnikov, K. P.K. P.Mogilnikov2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5037Non-destructive characterisation of porosity and pore size distribution in porous low-k dielectric filmsProceedings paper