Reliability test methodology for MEMS and MOEMS under electrical overstress and electrostatic discharge stress

Sangameswaran, SandeepSandeepSangameswaranDe Coster, JeroenJeroenDe CosterGroeseneken, GuidoGuidoGroesenekenDe Wolf, IngridIngridDe Wolf2021-10-202021-10-2020121537-1646https://imec-publications.be/handle/20.500.12860/21453Reliability test methodology for MEMS and MOEMS under electrical overstress and electrostatic discharge stressJournal article