Goethals, FrederikFrederikGoethalsBaklanov, MikhaïlMikhaïlBaklanovCiofi, IvanIvanCiofiDetavernier, ChristopheChristopheDetavernierVan Der Voort, PascalPascalVan Der VoortVan Driessche, IsabelIsabelVan Driessche2021-10-202021-10-2020121359-7345https://imec-publications.be/handle/20.500.12860/20727A new procedure to seal the pores of mesoporous low-k films with precondensed organosilica oligomersJournal article