Wong, PatrickPatrickWongSinkwitz, StephanStephanSinkwitzHansen, Steven G.Steven G.HansenGoethals, MiekeMiekeGoethalsConley, WillWillConley2021-10-152021-10-152002https://imec-publications.be/handle/20.500.12860/7059Progress in 157-nm resist performance and potentialProceedings paper