Ciesielski, RichardRichardCiesielskiLoo, RogerRogerLooShimura, YosukeYosukeShimuraBogdanowicz, JanuszJanuszBogdanowiczMani, AntonioAntonioManiMitterbauer, ChristophChristophMitterbauerTruong, Vinh-BinhVinh-BinhTruongKolbe, MichaelMichaelKolbeSoltwisch, VictorVictorSoltwisch2024-08-262024-06-152024-08-262024978-1-5106-7216-10277-786XWOS:001224296200004https://imec-publications.be/handle/20.500.12860/44039Soft X-ray reflectometry for the inspection of interlayer roughness in stacked thin film structuresProceedings paper10.1117/12.3009953978-1-5106-7217-8WOS:001224296200004