Hellin, DavidDavidHellinGeens, V.V.GeensTeerlinck, IvoIvoTeerlinckVan Steenbergen, JanJanVan SteenbergenRip, JensJensRipLaureyn, WimWimLaureynRaskin, GeoffroyGeoffroyRaskinMertens, PaulPaulMertensDe Gendt, StefanStefanDe GendtVinckier, ChrisChrisVinckier2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10564VPD-DC-TXRF for metallic contamination analysis of Ge wafersProceedings paper