Substrate off-angle effects on P-doping of (110)-oriented CVD diamond films

Balasubramaniam, Y.Y.BalasubramaniamD'Haen, JanJanD'HaenSoltani, A.A.SoltaniJanssens, S.D.S.D.JanssensHaenen, KenKenHaenen2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20340Substrate off-angle effects on P-doping of (110)-oriented CVD diamond filmsOral presentation