Lawrie, KirstenKirstenLawrieBlakey, IdrissIdrissBlakeyBlinco, JamesJamesBlincoGronheid, RoelRoelGronheidJack, KevinKevinJackPollentier, IvanIvanPollentierLeeson, MichaelMichaelLeesonYounkin, ToddToddYounkinWhittaker, AndrewAndrewWhittaker2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17452Poly(olefin sulfone)s - A materials platform for studying resist derived contaminationProceedings paper