High density, low leakage back-end 3D capacitors for mixed signals applications

Detalle, MikaelMikaelDetalleBarrenetxea, MikelMikelBarrenetxeaMuller, PhilippePhilippeMullerPotoms, GoedeleGoedelePotomsPhommahaxay, AlainAlainPhommahaxaySoussan, PhilippePhilippeSoussanVaesen, KristofKristofVaesenDe Raedt, WalterWalterDe Raedt2021-10-182021-10-1820100167-9317https://imec-publications.be/handle/20.500.12860/17013High density, low leakage back-end 3D capacitors for mixed signals applicationsJournal articlehttp://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6V0W-50J9GPT-2&_user=799533&_coverDate=07%2F16%2F2010&_rdoc=1&_fmt=hig