Delabie, AnneliesAnneliesDelabieJayachandran, SuseendranSuseendranJayachandranBillen, ArneArneBillenDouhard, BastienBastienDouhardConard, ThierryThierryConardMeersschaut, JohanJohanMeersschautBender, HugoHugoBenderDemeulemeester, JelleJelleDemeulemeesterVandervorst, WilfriedWilfriedVandervorstCaymax, MattyMattyCaymaxHeyns, MarcMarcHeyns2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23743Surface chemistry of deposition processes for epitaxial Si-O superlatticesMeeting abstracthttp://www.ald2014.org/pdf/ALD2014Program_V4.pdf