Multi-response optimization of ultrathin poly-SiGe films characteristics for nano- electromechanical systems (NEMS) using the Grey-Taguchi technique

Asafa, TesleemTesleemAsafaBryce, GeorgeGeorgeBryceSaid, SyedSyedSaidWitvrouw, AnnAnnWitvrouwSeveri, SimoneSimoneSeveri2021-10-212021-10-2120130167-9317https://imec-publications.be/handle/20.500.12860/21992Multi-response optimization of ultrathin poly-SiGe films characteristics for nano- electromechanical systems (NEMS) using the Grey-Taguchi techniqueJournal article