Soethoudt, JobJobSoethoudtTomczak, YoannYoannTomczakGrillo, FabioFabioGrilloHody, HubertHubertHodyMarques, EstebanEstebanMarquesVan Ommen, RuudRuudVan OmmenAltamirano Sanchez, EfrainEfrainAltamirano SanchezDelabie, AnneliesAnneliesDelabie2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31830Insight in growth mechanism of Ru ALD on dielectricsMeeting abstract