Understanding and prediction of EWF modulation induced by various dopants in the gate stack for a gate-first integration scheme

Wang, Xin PengXin PengWangYu, HongYuHongYuYuYeo, Y.-C.Y.-C.YeoLi, M.-F.M.-F.LiChang, Shou-ZenShou-ZenChangCho, Hag-JuHag-JuChoKubicek, StefanStefanKubicekWouters, DirkDirkWoutersGroeseneken, GuidoGuidoGroesenekenBiesemans, SergeSergeBiesemans2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14775Understanding and prediction of EWF modulation induced by various dopants in the gate stack for a gate-first integration schemeProceedings paper