Xu, KaidongKaidongXuKesters, ElsElsKestersVereecke, GuyGuyVereeckeLux, MarcelMarcelLuxKraus, HHKrausHenry, S.A.S.A.HenryArcher, LLArcherGaulhofer, E.E.GaulhoferKovacs, F.F.KovacsDalmer, MMDalmerSchmidt, TTSchmidtLeunissen, PeterPeterLeunissenMertens, PaulPaulMertensLuo, S.J.S.J.LuoHan, Q. Y.Q. Y.Han2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13238Effect of plasma treatments on the compatibility of ULK to wet cleaningProceedings paper