Zschaetzsch, GerdGerdZschaetzschHoffmann, Thomas Y.Thomas Y.HoffmannHoriguchi, NaotoNaotoHoriguchiHautala, Y.Y.HautalaShao, Y.Y.ShaoVandervorst, WilfriedWilfriedVandervorst2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/20235Novel approach to conformal FINFET extension dopingProceedings paper