A 65-nm node SRAM solution using alt-PSM with ArF lithography

Driessen, FrankFrankDriessenZawadzki, Mary T.Mary T.ZawadzkiKrishnan, Prakash R.Prakash R.KrishnanBalasinski, ArturArturBalasinskiVandenberghe, GeertGeertVandenberghe2021-10-152021-10-152004-05https://imec-publications.be/handle/20.500.12860/8862A 65-nm node SRAM solution using alt-PSM with ArF lithographyProceedings paper