Kim, Dong-OokDong-OokKimKim, JihoonJihoonKimKang, NamgooNamgooKangHer, YoungjunYoungjunHerMiyazaki, ShinjiShinjiMiyazakiAlperson, BoazBoazAlperson2025-07-312025-07-312025978-1-5106-8640-30277-786XWOS:001517361100013https://imec-publications.be/handle/20.500.12860/45976Improvement of EUV Contact Hole Pattern Rectification using Novel Directed Self-Assembly MaterialsProceedings paper10.1117/12.3051492978-1-5106-8641-0WOS:001517361100013