Interplay between relaxation and Sn segregation during thermal annealing of GeSn strained layers

Comrie, C.M.C.M.ComrieMtshali, C.B.C.B.MtshaliSechogela, P.T.P.T.SechogelaSantos, N.M.N.M.SantosVan Stiphout, K.K.Van StiphoutLoo, RogerRogerLooVantomme, AndreAndreVantomme2021-10-232021-10-232016-100021-8979https://imec-publications.be/handle/20.500.12860/26470Interplay between relaxation and Sn segregation during thermal annealing of GeSn strained layersJournal articlehttp://scitation.aip.org/content/aip/journal/jap/120/14/10.1063/1.4964692