Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phase

Edinger, PierrePierreEdingerJo, GaehunGaehunJoNguyen, Chris Phong VanChris Phong VanNguyenTakabayashi, Alain YujiAlain YujiTakabayashiErrando-Herranz, CarlosCarlosErrando-HerranzAntony, CleitusCleitusAntonyTalli, GiuseppeGiuseppeTalliVerheyen, PeterPeterVerheyenKhan, Muhammad UmarMuhammad UmarKhanBleiker, Simon J.Simon J.BleikerBogaerts, WimWimBogaertsQuack, NielsNielsQuackNiklaus, FrankFrankNiklausGylfason, Kristinn B.Kristinn B.Gylfason2023-07-052023-03-262023-07-0520231094-4087WOS:000942062500006https://imec-publications.be/handle/20.500.12860/41371Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phaseJournal article10.1364/OE.480219WOS:000942062500006BACKSCATTERINGMEDLINE:36823907