Thomas, RejiRejiThomasEhrhart, PeterPeterEhrhartRoeckerath, MartinMartinRoeckerathVan Elshocht, SvenSvenVan ElshochtRije, EduardEduardRijeLuysberg, MartinaMartinaLuysbergBoese, MarkusMarkusBoeseSchubert, JürgenJürgenSchubertCaymax, MattyMattyCaymaxWaser, RainerRainerWaser2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12968Liquid injection MOCVD of dysprosium scandate films. Deposition characteristics and high-k applicationsJournal article