Discussion on the figures of merit of identified traps located in the Si flm: surface versus volume trap densities

Cretu, BogdanBogdanCretuSimoen, EddyEddySimoenHellings, GeertGeertHellingsLinten, DimitriDimitriLintenClaeys, CorCorClaeys2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/34942Discussion on the figures of merit of identified traps located in the Si flm: surface versus volume trap densitiesProceedings paperhttps://doi.org/10.1149/09705.0045ecst