Sub-monolayer ALD ruthenium studied with Rutherford backscattering spectrometry

Laricchiuta, GraziaGraziaLaricchiutaVandervorst, WilfriedWilfriedVandervorstMeersschaut, JohanJohanMeersschaut2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28756Sub-monolayer ALD ruthenium studied with Rutherford backscattering spectrometryMeeting abstract