Intra-die temperature non uniformity related to front side emissivity depandence during rapid thermal annealing

Laviron, C.C.LavironLindsay, RichardRichardLindsayMichallet, A.A.MichalletHalimaoui, A.A.HalimaouiGranneman, E.E.Granneman2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7786Intra-die temperature non uniformity related to front side emissivity depandence during rapid thermal annealingProceedings paper