Sun, YitingYitingSunde Roover, RoelRoelde RooverStruyf, HerbertHerbertStruyfDe Feyter, StevenStevenDe FeyterArmini, SilviaSilviaArmini2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27366The influence of solvents on the quality of SAMs for low-k pore sealing purposeMeeting abstract