Popovici, Mihaela IoanaMihaela IoanaPopoviciVan Elshocht, SvenSvenVan ElshochtMenou, NicolasNicolasMenouFavia, PaolaPaolaFaviaBender, HugoHugoBenderRosseel, ErikErikRosseelSwerts, JohanJohanSwertsVrancken, ChristaChristaVranckenMoussa, AlainAlainMoussaTielens, HildeHildeTielensTomida, KazuyukiKazuyukiTomidaPawlak, MalgorzataMalgorzataPawlakKaczer, BenBenKaczerSchoofs, GeertGeertSchoofsVandervorst, WilfriedWilfriedVandervorstWouters, DirkDirkWoutersKittl, JorgeJorgeKittl2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17829Impact of thermal treatment upon morphology and crystallinity of strontium titanate films deposited by atomic layer depositionMeeting abstract