Heterogeous III-V/silicon photonics: bonding technology and integrated devices

Roelkens, GuntherGuntherRoelkensBrouckaert, JoostJoostBrouckaertVan Campenhout, J.J.Van CampenhoutVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-162021-10-162007-05https://imec-publications.be/handle/20.500.12860/12782Heterogeous III-V/silicon photonics: bonding technology and integrated devicesProceedings paper