On the TEM assessment of local strain distributions in integrated circuit structures

Vanhellemont, JanJanVanhellemontArmigliato, A.A.ArmigliatoFrabboni, S.S.FrabboniBalboni, R.R.BalboniJanssens, KoenraadKoenraadJanssens2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/423On the TEM assessment of local strain distributions in integrated circuit structuresProceedings paper